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Characterization of Zinc Oxide Films Grown by a Newly Developed Plasma Enhanced Metal Organic Chemical Vapor Deposition Employing Microwave Excited High Density Plasma
Asahara, Hirokazu, Inokuchi, Atsutoshi, Watanuki, Kohei, Hirayama, Masaki, Teramoto, Akinobu, Ohmi, TadahiroVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.2994
Date:
April, 2008
File:
PDF, 555 KB
english, 2008