Formation of Cobalt and Cobalt-Silicide Nanodots on Ultrathin SiO 2 Induced by Remote Hydrogen Plasma
Kawanami, Akira, Makihara, Katsunori, Ikeda, Mitsuhisa, Miyazaki, SeiichiVolume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.08JA04
Date:
August, 2010
File:
PDF, 668 KB
english, 2010