Effects of Heat Treatment on Thermally Oxidized Silicon

Japanese Journal of Applied Physics 1966 / 5 Vol. 5; Iss. 5

Effects of Heat Treatment on Thermally Oxidized Silicon

Ichinohe, Eisuke, Kubo, Shuji, Akiyama, Kenji
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Volume:
5
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.5.454
Date:
May, 1966
File:
PDF, 125 KB
english, 1966
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