Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
2001 Vol. 470; Iss. 1-2
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Stress reduction of Mo/Si multilayer structures
S.S. Andreev, N.N. Salashchenko, L.A. Suslov, A.N. Yablonsky, S.Yu. ZuevVolume:
470
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0168-9002(01)01018-x
File:
PDF, 126 KB
english, 2001