Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
2001 Vol. 470; Iss. 1-2
Study of structure and phase composition of nanocrystal silicon carbonitride films
N.I. Fainer, E.A. Maximovski, Yu.M. Rumyantsev, M.L. Kosinova, F.A. KuznetsovVolume:
470
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0168-9002(01)01043-9
File:
PDF, 140 KB
english, 2001