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Electron-beam-induced absorption of ArF, KrF, and XeF laser radiation in optical materials
Barabanov, V S, Sergeev, P BVolume:
25
Language:
english
Journal:
Quantum Electronics
DOI:
10.1070/QE1995v025n07ABEH000451
Date:
July, 1995
File:
PDF, 241 KB
english, 1995