Deposition and characterization of titania–silica optical...

Journal of Physics D Applied Physics 2010 / 02 Vol. 43; Iss. 4

Deposition and characterization of titania–silica optical multilayers by asymmetric bipolar pulsed dc sputtering of oxide targets

Sagdeo, P R, Shinde, D D, Misal, J S, Kamble, N M, Tokas, R B, Biswas, A, Poswal, A K, Thakur, S, Bhattacharyya, D, Sahoo, N K, Sabharwal, S C
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Volume:
43
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/43/4/045302
Date:
February, 2010
File:
PDF, 1.65 MB
english, 2010
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