Automatic recognition of defect areas on a semiconductor...

Measurement Science and Technology 2009 / 07 Vol. 20; Iss. 7

Automatic recognition of defect areas on a semiconductor wafer using multiple scanning electron microscope images

Nakagaki, Ryo, Honda, Toshifumi, Nakamae, Koji
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Volume:
20
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/20/7/075503
Date:
July, 2009
File:
PDF, 1.58 MB
english, 2009
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