A universal ion-beam-sputtering device for diffusion...

Measurement Science and Technology 1996 / 04 Vol. 7; Iss. 4

A universal ion-beam-sputtering device for diffusion studies

Wenwer, Friedrich, Gude, Anja, Rummel, Gerhard, Eggersmann, Martin, Zumkley, Thomas, Stolwijk, Nicolaas A, Mehrer, Helmut
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Volume:
7
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/7/4/021
Date:
April, 1996
File:
PDF, 186 KB
english, 1996
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