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[IEEE 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2015.5.3-2015.5.6)] 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Real-Time Information Base as key enabler for Manufacturing Intelligence and “Industrie 4.0”
Luhn, Gerhard, Habich, Dirk, Bartl, Katrin, Postel, Johannes, Stevens, Travis, Zinner, MartinYear:
2015
Language:
english
DOI:
10.1109/ASMC.2015.7164474
File:
PDF, 454 KB
english, 2015