Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
2002 Vol. 480; Iss. 1
The production of CxHx−1 film using low pressure plasma CVD
Wu Weidong, Luo Jiangshan, Huang Yong, Gao Dangzhong, Zhang Zhanwen, Zhao ChunpeiVolume:
480
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0168-9002(01)02073-3
File:
PDF, 322 KB
english, 2002