Optimization of ICPCVD Amorphous Silicon for Optical MEMS...

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Journal of Microelectromechanical Systems 2015

Optimization of ICPCVD Amorphous Silicon for Optical MEMS Applications

Tripathi, Dhirendra Kumar, Jiang, Fei, Martyniuk, Mariusz, Antoszewski, Jarek, Silva, K. K. M. B. Dilusha, Dell, John M., Faraone, Lorenzo
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Year:
2015
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2459066
File:
PDF, 1.40 MB
english, 2015
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