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Influence of Crystalline Defects and Residual Stress on the Electrical Characteristics of SOS MOS Devices
Onga, Shinji, Hatanaka, Katsunori, Kawaji, Shinji, Yasuda, YukioVolume:
17
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.17.413
Date:
February, 1978
File:
PDF, 853 KB
english, 1978