Design Considerations for Silicon Circular Diaphragm...

Japanese Journal of Applied Physics 1982 / 7 Vol. 21; Iss. Part 1, No

Design Considerations for Silicon Circular Diaphragm Pressure Sensors

Yasukawa, Akio, Shimada, Satoshi, Matsuoka, Yoshitaka, Kanda, Yozo
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Volume:
21
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.21.1049
Date:
July, 1982
File:
PDF, 1.17 MB
1982
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