Secondary Electron Measurement with Auger Electron...

Japanese Journal of Applied Physics 1985 / 9 Vol. 24; Iss. Part 1, No

Secondary Electron Measurement with Auger Electron Microprobe. I. Calibration of the CMA in the Low-Energy Region

Ogoh, Ikuo, Shimizu, Ryuichi, Hashimoto, Hatsujiro
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Volume:
24
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.1145
Date:
September, 1985
File:
PDF, 1.01 MB
english, 1985
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