Scanning Optical Fiber Microscope for High Resolution Laser...

Japanese Journal of Applied Physics 1985 / 8 Vol. 24; Iss. Part 2, No

Scanning Optical Fiber Microscope for High Resolution Laser Beam Induced Current Image Observation of Semiconductor Defects

Ogura, Mutsuo, Sakaue, Katsuhiko, Tokumaru, Yozo
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Volume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.L617
Date:
August, 1985
File:
PDF, 891 KB
1985
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