The Role of Gallium Antisite Defect in Activation and...

Japanese Journal of Applied Physics 1985 / 12 Vol. 24; Iss. Part 2, No

The Role of Gallium Antisite Defect in Activation and Type-Conversion in Si Implanted GaAs

Hiramoto, Toshiro, Mochizuki, Yasunori, Saito, Toshio, Ikoma, Toshiaki
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Volume:
24
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.L921
Date:
December, 1985
File:
PDF, 220 KB
english, 1985
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