XPS Studies of a-Si 1-...

Japanese Journal of Applied Physics 1990 / 4 Vol. 29; Iss. Part 2, No

XPS Studies of a-Si 1- x C x :H Prepared from C 2 H 4 /SiH 4 Gas Mixtures

Suzuki, Yoshiko, Meikle, Scott, Fukuda, Yasuo, Hatanaka, Yoshinori
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Volume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L663
Date:
April, 1990
File:
PDF, 438 KB
english, 1990
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