Fabrication of Tungsten-Carbon Multilayers for Soft X-Ray...

Japanese Journal of Applied Physics 1992 / 6 Vol. 31; Iss. Part 1, No

Fabrication of Tungsten-Carbon Multilayers for Soft X-Ray Optics Using Excimer-Laser-Induced Chemical Vapor Deposition Technique

Yamada, Yuka, Mutoh, Katsuhiko, Iwabuchi, Takashi, Miyata, Takeo
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Volume:
31
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.1982
Date:
June, 1992
File:
PDF, 110 KB
english, 1992
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