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Influence of Hydrogen on Electrical Characteristics of Poly-Si Resistor
Nakabayashi, Masakazu, Ikegami, Masaaki, Daikoku, TsutomuVolume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.3734
Date:
September, 1993
File:
PDF, 777 KB
english, 1993