Defect Equilibration and Intrinsic Stress in Undoped Hydrogenated Amorphous Silicon
Kitsuno, Yu, Cho, Gyuseong, Drewery, John, Hong, Wan-Shick, Perez-Mendez, VictorVolume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.1261
Date:
March, 1994
File:
PDF, 272 KB
english, 1994