Passivation of GaAs Power Field-Effect Transistor Using...

Japanese Journal of Applied Physics 1994 / 12 Vol. 33; Iss. Part 2, No

Passivation of GaAs Power Field-Effect Transistor Using Electron Cyclotron Resonance Chemical Vapor Deposition Silicon Nitride Technique

Chang, Edward Yi, Lin, Kun-Chun, Wu, Janne-Wha, Chen, Tzu-Hung, Chen, John-Sea, Wang, Sheng-Ping
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L1659
Date:
December, 1994
File:
PDF, 199 KB
english, 1994
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