Indium Doped nMOSFETs and Buried Channel pMOSFETs with...

Indium Doped nMOSFETs and Buried Channel pMOSFETs with n + Polysilicon Gate

Lee, Yeong-Taek, Song, Ki-Whan, Park, Byung-Gook, Lee, Jong Duk
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Volume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.1341
Date:
March, 1997
File:
PDF, 616 KB
english, 1997
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