Electron Energy Control in Inductively Coupled Plasma...

Japanese Journal of Applied Physics 1999 / 9 Vol. 38; Iss. Part 2, No

Electron Energy Control in Inductively Coupled Plasma Employing Multimode Antenna

Shindo, Haruo, Urayama, Takuya, Fujii, Takashi, Horiike, Yasuhiro, Fujii, Syuitsu
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Volume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.L1066
Date:
September, 1999
File:
PDF, 636 KB
english, 1999
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