Effect of Pulse Frequency on Leveling and Resistivity of...

Japanese Journal of Applied Physics 2002 / 5 Vol. 41; Iss. Part 1, No

Effect of Pulse Frequency on Leveling and Resistivity of Copper Coatings

Chen, Chia-Fu, Lin, Kun-Cheng
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.2881
Date:
May, 2002
File:
PDF, 997 KB
english, 2002
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