Fabrication and Characterization of Ru Thin Films Prepared...

Japanese Journal of Applied Physics 2002 / 2 Vol. 41; Iss. Part 1, No

Fabrication and Characterization of Ru Thin Films Prepared by Liquid Delivery Metal-Organic Chemical Vapor Deposition

Kim, Kyoung-Won, Kim, Nam-Soo, Kim, Yeong-Seuk, Choi, Il-Sang, Kim, Ho-Joung, Park, Ju-Chul, Lee, Soun-Young
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.820
Date:
February, 2002
File:
PDF, 1.09 MB
english, 2002
Conversion to is in progress
Conversion to is failed