Formation of Nanoparticles by Control of Electron...

Japanese Journal of Applied Physics 2006 / 10 Vol. 45; Iss. 10B

Formation of Nanoparticles by Control of Electron Temperature in Hollow-Typed Magnetron Radio Frequency CH 4 /H 2 Plasma

Emi, Junichi, Kato, Kohgi, Abe, Toshimi, Iizuka, Satoru
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.8071
Date:
October, 2006
File:
PDF, 257 KB
english, 2006
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