Characterization of Slurry Residues in Pad Grooves for...

Japanese Journal of Applied Physics 2006 / 12 Vol. 45; Iss. No. 50

Characterization of Slurry Residues in Pad Grooves for Diamond Disc and High Pressure Micro Jet Pad Conditioning Processes

Lee, Hyosang, Seike, Yoshiyuki, Li, Zhonglin, Zhuang, Yun, Takaoka, Mineo, Miyachi, Keiji, Philipossian, Ara
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.L1325
Date:
December, 2006
File:
PDF, 173 KB
english, 2006
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