Development of Si Neural Probe with Microfluidic Channel Fabricated Using Wafer Direct Bonding
Kanno, Soichiro, Kobayashi, Risato, Sanghoon, Lee, Jicheol, Bea, Fukushima, Takafumi, Sakamoto, Kazuhiro, Katayama, Norihiro, Mushiake, Hajime, Tanaka, Tetsu, Koyanagi, MitsumasaVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.04C189
Date:
April, 2009
File:
PDF, 510 KB
english, 2009