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Surface Treatment of Flat Panel Display Substrates by a Uniform Large Area Glow Cold Plasma Tunnel at Atmospheric Pressure
Wang, Shouguo, Wan, Jun, Jia, Xianghong, Zhao, LingliVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.096003
Date:
September, 2009
File:
PDF, 316 KB
english, 2009