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Growth of Compositionally Graded SiGe Bulk Crystal and Its Application As Substrate with Lateral Variation in Ge Content
Nihei, Ryota, Usami, Noritaka, Nakajima, KazuoVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.115507
Date:
November, 2009
File:
PDF, 314 KB
english, 2009