Effects of Aluminum Electrode and Hydrogen Gas during Heat Treatments on MOS Structure
Tokutaka, Heizō, Kubo, Shūji, Akiyama, KenjiVolume:
5
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.5.841
Date:
September, 1966
File:
PDF, 291 KB
1966