Epitaxial growth of phase-pure ε-Ga2O3 by halide vapor...

Journal of Applied Physics 2015 / 08 Vol. 118; Iss. 8

Epitaxial growth of phase-pure ε-Ga2O3 by halide vapor phase epitaxy

Oshima, Yuichi, Víllora, Encarnación G., Matsushita, Yoshitaka, Yamamoto, Satoshi, Shimamura, Kiyoshi
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Volume:
118
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4929417
Date:
August, 2015
File:
PDF, 1.61 MB
english, 2015
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