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Epitaxial growth of phase-pure ε-Ga2O3 by halide vapor phase epitaxy
Oshima, Yuichi, Víllora, Encarnación G., Matsushita, Yoshitaka, Yamamoto, Satoshi, Shimamura, KiyoshiVolume:
118
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4929417
Date:
August, 2015
File:
PDF, 1.61 MB
english, 2015