A large-force fluidic device micromachined in silicon
Cho, Changho, Kim, Jongpal, Cho, Dong-il DanVolume:
8
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/8/3/004
Date:
September, 1998
File:
PDF, 405 KB
english, 1998