Focused-ion beam fabrication of nanometer orifices for leak...

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Focused-ion beam fabrication of nanometer orifices for leak detection

G. Firpo, L. Repetto, F. Buatier De Mongeot, U. Valbusa
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Year:
2009
Language:
english
DOI:
10.1116/1.3243229
File:
PDF, 885 KB
english, 2009
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