Low-Temperature Thermal-Oxidation of Amorphous-Silicon and Its Application to Amorphous-Silicon MOS Transistors
Uchida, Yasutaka, Ikegami, Takashi, Matsumura, MasakiyoVolume:
24
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.L733
Date:
September, 1985
File:
PDF, 999 KB
english, 1985