Pulsed Laser-Induced Amorphization of Polycrystalline...

Japanese Journal of Applied Physics 1990 / 4 Vol. 29; Iss. Part 2, No

Pulsed Laser-Induced Amorphization of Polycrystalline Silicon Film

Sameshima, Toshiyuki, Hara, Masaki, Usui, Setsuo
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Volume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L548
Date:
April, 1990
File:
PDF, 2.11 MB
english, 1990
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