Atomic Force Microscope Using an Optical Fiber Heterodyne Interferometer Free from External Disturbances
Oshio, Takanori, Nakatani, Noboru, Sakai, Yoshiyuki, Suzuki, NorihitoVolume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.2994
Date:
June, 1993
File:
PDF, 628 KB
english, 1993