High-Resolution Analysis on Patterned Resist by Auger Electron Spectroscopy
Manabe, Yuji, Takahashi, Reiko, Shiibashi, Toru, Yanagihara, KenjiVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.5765
Date:
December, 1993
File:
PDF, 851 KB
1993