Application of Radio-Frequency Discharged Plasma Produced...

Japanese Journal of Applied Physics 1994 / 1 Vol. 33; Iss. Part 2, No

Application of Radio-Frequency Discharged Plasma Produced in Closed Magnetic Neutral Line for Plasma Processing

Uchida, Taijiro
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L43
Date:
January, 1994
File:
PDF, 144 KB
english, 1994
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