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Proposal of a Micro-Fabrication Process for Al Nanostructures
Hoshino, Tadatsugu, Enomoto, Nobuyuki, Okano, Kaori, Tsuda, MinoruVolume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.4049
Date:
June, 1997
File:
PDF, 179 KB
english, 1997