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Charging Damages to Gate Oxides in a Helicon O 2 Plasma
Lin, Wendy, Kang, Tzong-Kuei, Perng, Yean-Chyi, Dai, Bau-Tong, Cheng, Huang-ChungVolume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.7362
Date:
December, 1997
File:
PDF, 771 KB
english, 1997