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Resolution of 1:1 Electron Stepper with Patterned Cold Cathode
Hongo, Hiroo, Ochiai, Yukinori, Kawaura, HisaoVolume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.4132
Date:
June, 2002
File:
PDF, 1.60 MB
english, 2002