Improved Crystalline Quality of GaN by Substrate Ion Beam...

Japanese Journal of Applied Physics 2002 / 6 Vol. 41; Iss. Part 1, No

Improved Crystalline Quality of GaN by Substrate Ion Beam Pretreatment

Cho, Yong Suk, Jhin, Junggeun, Koh, Eui Kwan, Park, Young Ju, Kim, Eun Kyu, Kim, Gyeungho, Min, Suk-Ki, Byun, Dongjin
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.4299
Date:
June, 2002
File:
PDF, 196 KB
english, 2002
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