A Reverse Selectivity Ceria Slurry for the Damascene Gate...

Japanese Journal of Applied Physics 2004 / 11 Vol. 43; Iss. 11A

A Reverse Selectivity Ceria Slurry for the Damascene Gate Chemical Mechanical Planarization Process

Kim, Sang-Kyun, Sohn, Hyung-Min, Paik, Ungyu, Katoh, Takeo, Park, Jea-Gun
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.7434
Date:
November, 2004
File:
PDF, 105 KB
english, 2004
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