Two-dimensional simulation of compact ECR plasma sources
Wu, Han-Ming, Graves, David B, Kilgore, MikeVolume:
6
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/6/2/017
Date:
May, 1997
File:
PDF, 1.23 MB
english, 1997