SPIE Proceedings [SPIE Photonics West 2001 - LASE - San Jose, CA (Saturday 20 January 2001)] Laser Applications in Microelectronic and Optoelectronic Manufacturing VI - Synthesis of silicon nanoparticles and impurity doping by laser ablation
Murakami, Kouichi, Makimura, Tetsuya, Mizuta, Taiji, Li, Changquing, Takeuchi, Daishi, Gower, Malcolm C., Helvajian, Henry, Sugioka, Koji, Dubowski, Jan J.Volume:
4274
Year:
2001
Language:
english
DOI:
10.1117/12.432512
File:
PDF, 165 KB
english, 2001