SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] Optical Micro- and Nanometrology in Manufacturing Technology - Study of the roughness and optical near field of mass surface by using a SNOM with shear-force regulation
Haidar, Youssef, de Fornel, Frederique, Zerouki, Chouki, Pinot, Patrick, Gorecki, Christophe, Asundi, Anand K.Volume:
5458
Year:
2004
Language:
english
DOI:
10.1117/12.545692
File:
PDF, 961 KB
english, 2004