Development of an optical sensor for 2D multi-point...

Development of an optical sensor for 2D multi-point alignment

J.-Ch. Barrière, H. Blumenfeld, M. Bourdinaud, O. Cloué, F. Molinié, Ph. Schune
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Volume:
387
Year:
1997
Language:
english
Pages:
2
DOI:
10.1016/s0168-9002(96)01003-0
File:
PDF, 186 KB
english, 1997
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