Deposition of Silicon Nitride Films by Microwave Glow...

Japanese Journal of Applied Physics 1973 / 2 Vol. 12; Iss. 2

Deposition of Silicon Nitride Films by Microwave Glow Discharge

Shima, Yasuji, Miyazaki, Takao, Nakamura, Nobuo, Adachi, Eiichi, Tokuyama, Takashi
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Volume:
12
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.12.309
Date:
February, 1973
File:
PDF, 1.49 MB
english, 1973
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